Semiconductor Device with an Edge Termination Structure Having a Closed Vertical Trench

ABSTRACT

A semiconductor device includes a semiconductor die having an outer edge and an active area defining a main horizontal surface and being spaced apart from the outer edge. The semiconductor device further includes an edge termination structure having a closed vertical trench surrounding the active area. The edge termination structure further includes at least one vertical trench arranged, in a horizontal cross-section, between the closed vertical trench and the active area. The at least one vertical trench includes an insulated side wall forming an acute angle with the outer edge.

PRIORITY CLAIM

This application is a Divisional of U.S. application Ser. No.13/205,759, filed on 9 Aug. 2011, the content of said applicationincorporated herein by reference in its entirety.

TECHNICAL FIELD

This specification refers to embodiments of semiconductor devices, inparticular power semiconductor devices, having field redistributingstructure. Furthermore, this specification refers to embodiments ofmanufacturing methods for such devices.

BACKGROUND

Many functions of modern devices in automotive, consumer and industrialapplications, such as computer technology, mobile communicationstechnology, converting electrical energy and driving an electric motoror an electric machine, rely on semiconductor devices, in particularsemiconductor transistors such as field-effect transistors (FETs), forexample MOSFETs (Metal Oxide Semiconductor Field-Effect Transistors) andIGBTs (Insulated-Gate Bipolar Transistors), and BJTs (Bipolar JunctionTransistors).

It is often desirable that rectifying semiconductor devices such asdiodes and IGBTs have a sufficiently high blocking capability.Accordingly, their rectifying pn-junction or pn-junctions are oftendesired to withstand sufficiently high reverse voltages. Unfavorabledimensioning may result in avalanche generation close to or at pointswhere the rectifying pn-junctions come to or near a surface.Accordingly, blocking capability may be reduced to values well below thevalue of the bulk breakthrough field strength of the semiconductormaterial.

To reduce the intensity of the electric fields near the edge of arectifying junction (e.g. pn-junction), high voltage semiconductordevices may include an edge termination structure in a peripheral areaarranged around an active area with the rectifying junction. An edgetermination structure provides a transition region in which the highelectric fields around the active area change gradually to the lowerpotential at the edge of the device. The edge termination structure may,for example, lower the field intensity around the termination region ofthe rectifying junction by spreading the electric field lines across thetermination region.

Planar edge-termination structures such as field plates, guard-ringstructures or channel stop region are arranged on or close to a mainhorizontal surface of the semiconductor device. Often a combination ofseveral edge-termination structures is used. To achieve high blockingcapability and stability, a comparatively large peripheral area istypically required when planar edge-termination structures are used.Furthermore, the size of the peripheral area typically rises with ratedblocking voltage. For example, for a rated blocking voltage of 600 V oneor more field-plates are used with a horizontal extension of theresulting edge-termination system of at least about 150 μm is typicallyrequired. For a rated blocking voltage of about 6.5 kV the horizontalextension of the edge-termination system using field plates is typicallylarger than about 2 mm. Accordingly, the fraction of the active areaused for switching and/or controlling the load current is significantlyreduced, and thus the costs per chip or die increased. Furthermore,forming these structures is often associated with increased processingrequirements.

Different thereto, vertical edge-termination structures, also known asmesa edge-termination structures, typically require less space. Forexample, a circumferential vertical trench filled with an insulating ora semi-insulating material may be used as edge-termination structure.However, for higher rated blocking voltages of 600 V or more, thedesired horizontal width of a circumferential vertical trench filledwith an insulating material is comparatively large. This may cause highmechanical stress. Furthermore, charges trapped in the insulatingmaterial may, in particular for bipolar semiconductor devices, result inincreased switching losses. Depositing semi-insulating materials onvertical sidewalls of the circumferential vertical trench is, on theother hand, associated with increased processing requirements.

For these and other reasons there is a need for the embodimentsdisclosed in the present application.

SUMMARY

According to an embodiment, a semiconductor device having asemiconductor die is provided. The semiconductor die includes a mainhorizontal surface, an outer edge, an active area, and a peripheralarea. The peripheral area includes a dielectric structure surroundingthe active area and extending from the main horizontal surface into thesemiconductor die. The dielectric structure includes, in a horizontalcross-section, at least one substantially L-shaped portion that isinclined against the outer edge.

According to an embodiment, a semiconductor device having asemiconductor die is provided. The semiconductor die includes an outeredge and an active area. The active area defines a main horizontalsurface and is spaced apart from the outer edge. The semiconductor diefurther includes an edge termination structure having at least onevertical trench. The at least one vertical trench has an insulated sidewall that forms, in a horizontal cross-section, an acute angle with theouter edge which is lower than about 20°.

According to an embodiment, a semiconductor device having asemiconductor die is provided. The semiconductor die includes an outeredge and an active area. The active area defines a main horizontalsurface and is spaced apart from the outer edge. The semiconductor diefurther includes an edge termination structure having at least onevertical trench. The at least one vertical trench at least partiallysurrounds, in a horizontal cross-section, the active area from at leasttwo sides and has an insulated side wall forming, in the horizontalcross-section, an acute angle with the outer edge.

According to an embodiment, a semiconductor device having asemiconductor die is provided. The semiconductor die includes an outeredge and an active area which defines a main horizontal surface and isspaced apart from the outer edge. The semiconductor die further includesan edge termination structure having a closed vertical trenchsurrounding the active area. The edge termination structure furtherincludes at least one vertical trench which is, in a horizontalcross-section, arranged between the closed vertical trench and theactive area. The at least one vertical trench includes an insulated sidewall forming, in the horizontal cross-section, an acute angle with theouter edge.

According to an embodiment, a semiconductor device having asemiconductor die is provided. The semiconductor die includes a mainhorizontal surface which is surrounded by an outer edge, an active area,and a peripheral area. The peripheral area includes at least onevertical trench which at least partly surrounds the active area. The atleast one vertical trench includes at least two portions which are, in ahorizontal cross-section, arranged at an angle of about 90°. The atleast two portions have respective insulated side walls which form, inthe horizontal cross-section, an acute angle with the outer edge.

According to an embodiment, a method for forming a semiconductor deviceis provided. The method includes providing a semiconductor substratehaving a main horizontal surface. A pn-junction is formed in thesemiconductor substrate. Typically, a portion of the pn-junction extendsto the main horizontal surface. A vertical trench is formed. Thevertical trench extends from the main horizontal surface into thesemiconductor substrate. A dielectric region is formed in the verticaltrench so that the dielectric region at least partly surrounds thepn-junction from at least two sides in a horizontal cross-section.

According to an embodiment, a method for forming a semiconductor deviceis provided. The method includes providing a semiconductor substratehaving a main horizontal surface. The method further includes definingan active area and a peripheral area. In the peripheral area adielectric structure is formed such that the dielectric structureextends from the main horizontal surface into the semiconductorsubstrate, surrounds the active area, and includes, in a horizontalcross-section, at least one L-shaped portion.

Those skilled in the art will recognize additional features andadvantages upon reading the following detailed description, and uponviewing the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of embodiments and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments andtogether with the description serve to explain principles ofembodiments. Other embodiments and many of the intended advantages ofthe embodiments will be readily appreciated as they become betterunderstood by reference to the following detailed description. Theelements of the drawings are not necessarily to scale relative to eachother. Like reference numerals designate corresponding similar parts.

FIG. 1 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIG. 2 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 3 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 4 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 5 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 6 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 7 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIG. 8 schematically illustrates an electric field distribution in asemiconductor device according to an embodiment.

FIG. 9 schematically illustrates current-voltage characteristics inblocking mode in a semiconductor device according to an embodiment.

FIG. 10 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIG. 11 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIG. 12 schematically illustrates, in a vertical cross-section, asemiconductor device according to one or more embodiments.

FIG. 13 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIG. 14 schematically illustrates, in a plane view, a semiconductordevice according to one or more embodiments.

FIGS. 15-21 schematically illustrate, in vertical cross-sections,processes of manufacturing a semiconductor device according to one ormore embodiments.

FIGS. 22-30 schematically illustrate, in vertical cross-sections,processes of manufacturing a semiconductor device according to one ormore embodiments.

DETAILED DESCRIPTION

In the following Detailed Description, reference is made to theaccompanying drawings, which form a part hereof, and in which is shownby way of illustration specific embodiments that may be practiced. Inthis regard, spatially relative terms, such as “top”, “bottom”, “front”,“back”, “leading”, “trailing”, “under”, “below”, “lower”, “over”,“upper” etc., is used with reference to the orientation of the figure(s)being described. These terms are used for ease of description to explainthe positioning of one element relative to a second element. Becausecomponents of embodiments can be positioned in a number of differentorientations, the spatially relative terms are used for purposes ofillustration and are in no way limiting. These terms are intended toencompass different orientations of the device in addition to differentorientations than those depicted in the figures. Further, terms such as“first”, “second”, and the like, are also used to describe variouselements, regions, sections, etc. and are also not intended to belimiting. It is to be understood that other embodiments may be utilizedand structural or logical changes may be made without departing from thescope of the present application. The following detailed description,therefore, is not to be taken in a limiting sense, and the scope of thepresent application is defined by the appended claims.

As used herein, the terms “having”, “containing”, “including”,“comprising” and the like are open ended terms that indicate thepresence of stated elements or features, but do not preclude additionalelements or features. The articles “a”, “an” and “the” are intended toinclude the plural as well as the singular, unless the context clearlyindicates otherwise.

Reference will now be made in detail to various embodiments, one or moreexamples of which are illustrated in the figures. Each example isprovided by way of explanation, and is not meant as a limitation of theapplication. For example, features illustrated or described as part ofone embodiment can be used on or in conjunction with other embodimentsto yield yet a further embodiment. It is intended that the presentapplication includes such modifications and variations. The examples aredescribed using specific language which should not be construed aslimiting the scope of the appending claims. The drawings are not scaledand are for illustrative purposes only. For clarity, the same elementsor manufacturing steps have been designated by the same references inthe different drawings if not stated otherwise.

The term “horizontal” as used in this specification intends to describean orientation substantially parallel to a first or main horizontalsurface of a semiconductor substrate or body. This can be for instancethe surface of a wafer or a die.

The term “vertical” as used in this specification intends to describe anorientation which is substantially arranged perpendicular to the firstsurface, i.e. parallel to the normal direction of the first surface ofthe semiconductor substrate or body.

In this specification, n-doped is referred to as first conductivity typewhile p-doped is referred to as second conductivity type. Alternatively,the semiconductor devices can be formed with opposite doping relationsso that the first conductivity type can be p-doped and the secondconductivity type can be n-doped. Furthermore, some figures illustraterelative doping concentrations by indicating “−” or “+” next to thedoping type. For example, “n” means a doping concentration which is lessthan the doping concentration of an “n”-doping region while an“n⁺”-doping region has a larger doping concentration than the “n”-dopingregion. However, indicating the relative doping concentration does notmean that doping regions of the same relative doping concentration haveto have the same absolute doping concentration unless otherwise stated.For example, two different n⁺-doping regions can have different absolutedoping concentrations. The same applies, for example, to an n⁺-dopingand a p⁺-doping region.

Specific embodiments described in this specification pertain to, withoutbeing limited thereto, semiconductor devices and manufacturing methodstherefore, in particular to semiconductor devices having an active areaand a peripheral area with an edge termination structure. Thesemiconductor devices are typically power semiconductor devices, forexample vertical power semiconductor devices. The active area mayinclude at least one diode and/or one or more transistors such asMOSFETs, IGBTs (Insulated-Gate Bipolar Transistors), JFETs(Junction-FETs) and BJTs (Bipolar Junction Transistors).

The term “power semiconductor device” as used in this specificationintends to describe a semiconductor device on a single chip or die withhigh voltage and/or high current switching capabilities. In other words,power semiconductor devices are intended for high current, typically inthe Ampere range, and/or voltages above 100 V, more typically above 200V, even more typically, above 500 V.

In the context of the present specification, the term “in ohmic contact”intends to describe that there is an ohmic electric connection or ohmiccurrent path between two regions, portion or parts of a semiconductordevice through the semiconductor device or between different electrodesof one or more devices or between an electrode or a metallization and aportion or a part of the semiconductor device. In the context of thepresent specification, the terms “ohmic current path” and “resistivecurrent path” are used synonymously. Further, the terms “ohmic contact”and “resistive contact” are used synonymously in the context of thepresent specification.

In the context of the present specification, the term “metallization”intends to describe a region or a layer with metallic or near metallicproperties with respect to electric conductivity. A metallization may bein contact with a semiconductor region to form an electrode, a padand/or a terminal of the semiconductor device. The metallization may bemade of a metal such as Al, Cu, W, Ti, Au, Ag, Ni, V, Sn and Co but mayalso be made of a material with metallic or near metallic propertieswith respect to electric conductivity such as highly doped n-type orp-type poly-Si, TiN or an electrically conductive silicide such as CoSi,TiSi or WSi₂ for example. The metallization may also include differentelectrically conductive materials, for example a stack of thosematerials.

In the following, embodiments pertaining to semiconductor devices areexplained mainly with reference to silicon (Si) semiconductor devices.Accordingly, a monocrystalline semiconductor region or layer istypically a monocrystalline Si-region or Si-layer. It should, however,be understood that the semiconductor body can be made of anysemiconductor material suitable for manufacturing a semiconductordevice. Examples include but are not limited to elementary semiconductormaterials such as silicon (Si) or germanium (Ge), group IV compoundsemiconductor materials such as silicon carbide (SiC) or silicongermanium (SiGe), binary, ternary or quaternary III-V semiconductormaterials such as gallium nitride (GaN), gallium arsenide (GaAs),gallium phosphide (GaP), indium phosphide (InP), indium galliumphosphide (InGaP), aluminum gallium nitride (AlGaN), aluminum indiumnitride (AlInN), indium gallium nitride (InGaN), aluminum gallium indiumnitride (AlGaInN) or indium gallium arsenide phosphide (InGaAsP), andbinary or ternary II-VI semiconductor materials such as cadmiumtelluride (CdTe) and mercury cadmium telluride (HgCdTe). The abovementioned semiconductor materials are also referred to as homojunctionsemiconductor materials. When combining two different semiconductormaterials a heterojunction semiconductor material is formed. Examples ofheterojunction semiconductor materials include, without being limitedthereto, aluminum gallium nitride (AlGaN)-aluminum gallium indiumnitride (AlGaInN), indium gallium nitride (InGaN)-aluminum galliumindium nitride (AlGaInN), indium gallium nitride (InGaN)-gallium nitride(GaN), aluminum gallium nitride (AlGaN)-gallium nitride (GaN), indiumgallium nitride (InGaN)-aluminum gallium nitride (AlGaN),silicon-silicon carbide (Si_(x)C_(1-x)) and silicon-SiGe heterojunctionsemiconductor materials. For power semiconductor applications currentlymainly Si, SiC, GaAs and GaN materials are used. If the semiconductorbody comprises a wide band-gap material such as SiC or GaN which has ahigh breakdown voltage and high critical avalanche field strength,respectively, the doping of the respective semiconductor regions can bechosen higher which reduces the on-resistance R_(on). Furthermore, theleakage current across pn-junctions formed in wide band-gap materials isoften negligible. The term “wide band-gap semiconductor material” asused in this specification intends to describe a semiconductor materialwith an electronic band-gap of about at least two electron volts (eV).

FIG. 1 is a schematic plane view on a semiconductor device 100.Semiconductor device 100 includes a semiconductor die or semiconductorchip 40 with a main horizontal surface. Semiconductor die 40 extends toan outer edge 18. In the exemplary embodiment, outer edge 18circumferentially surrounds die 40 which is, in the plane view,substantially shaped as a rectangle, for example square-shaped. Die 40includes an active area 110 and a peripheral area 120. FIG. 1corresponds to a view on the main horizontal surface or top surface ofdie 40. Typically, FIG. 1 also corresponds to a horizontal cross-sectionthrough a portion of die 40 next to the main horizontal surface. Forsake of clarity, any substructures of active area 110 and metallizationsarranged on active area 110 are not illustrated in FIG. 1. Active area110 may include a plurality of cells, for example a plurality ofMOSFET-cells, an IGBT-cells, and/or TEDFET-cells, i.e. cells of a TrenchExtended Drain Field-Effect Transistor. However, active area 110 mayalso include only one bipolar transistor or one diode. Typically, activearea 120 includes at least one rectifying junction, more typically apn-junction 14 a.

According to an embodiment, peripheral area 120 includes a dielectricstructure 7 which surrounds active area 110 and extends from the mainhorizontal surface into semiconductor die 40. Dielectric structure 7forms a semiconductor-insulator interface 19 with die 40 which isinclined against outer edge 18. Accordingly, an edge terminationstructure is formed in the peripheral area 120. Typically, an acuteangle α ranging from about 1° to about 20° is formed betweensubstantially straight portions of semiconductor-insulator interface 19and substantially straight portions of outer edge 18. The acute angle αmay also be larger than about 20°, for example about 25% or even larger.However, this will result in a dielectric structure 7 which requires acorrespondingly larger area.

In the exemplary embodiment, the peripheral area 120 is arranged in anouter n-type semiconductor region 2 of semiconductor die 40 and theactive area 110 includes a p-type semiconductor region 1 forming apn-junction within the semiconductor die 40. A portion 14 a of thepn-junction may extend to the main horizontal surface next to theperipheral area 120. Accordingly, the p-type semiconductor region 1, andthus the active area 110, is surrounded by the dielectric structure 7but not insulated from the outer n-type semiconductor region 2.

When the semiconductor device 100 is in a blocking mode, i.e. when thepn-junction is reverse-biased, the electric field caused by thepn-junction is, at least in a horizontal direction, redistributed by theedge termination structure. More specifically, the dielectric materialof dielectric structure 7, for example silicon oxide, silicon nitride,silicon oxynitride or a stack of these materials, tolerates a muchhigher electric field than the semiconductor material of die 40.Accordingly, dielectric structure 7 may carry a substantial portion,more typical a large portion, even more typical a major portion of theelectric field during the blocking mode. On the other hand, the sourcesof an electric field are charges. Accordingly, the electric field duringthe blocking-mode is to be balanced by respective counter charges.According to an embodiment, this is achieved by charges of a spacecharge region in the semiconductor material and surface charges on or atthe semiconductor-insulator 19. Accordingly, an edge termination thatonly requires a very small area of die 40 is provided. According tosimulations, a rated blocking voltage of 600V is possible with such edgeterminations having a horizontal extension of only about 15 μm or evenless, compared to about 100 μm or more occupied by known edgeterminations structures at the same blocking voltage.

Due to inclining dielectric structure 7 against the outer edge 18, thereis, during blocking mode, always a component of the electric field thatis parallel to the semiconductor-insulator 19. Accordingly, chargecarriers that are generated thermally or by ionizing radiation duringthe blocking mode, are guided along the semiconductor-insulator to ajunction and/or terminal where they are discharged and/or recombined.This is particularly important for holes ⊕ (p-charge carriers) which arein the exemplary embodiment illustrated in FIG. 1 guided to thepn-junction 14 a during the blocking mode. Electrons are typicallydischarged to a metallization on the backside in contact with the outern-type semiconductor region 2 and/or an optional adjoining n⁺-typecontact region 3. This avoids charge accumulation during the blockingmode and thus reduces switching losses. It goes without saying that thedoping relations may also be reversed and that also electrons (n-chargecarriers) can be guided by the dielectric structure 7.

Dielectric structure 7 is typically arranged in a vertical trench 27extending from the main horizontal surface into semiconductor die 40.Vertical trench 27 may be completely filled with a dielectric materialsuch as silicon oxide or only partly filled. Vertical trench 27 at leastincludes an insulated side wall 91 forming the semiconductor-insulatorinterface 19 with adjoin mesa regions 2. The insulated side wall 91 may,in the horizontal direction, extend to the active area 110 and thep-type semiconductor region 1, respectively.

In the exemplary embodiment, dielectric structure 7 is formed as arectangular dielectric spiral 70. Typically, the rectangular dielectricspiral 70 winds at least two times, more typically, at least 5 times,even more typically at least ten times around the active area 110.Accordingly, several insulator-semiconductor interfaces 19 are arrangedbetween the pn-junction and outer edge 18. This allows a reduction inthe electric field during the blocking mode in the semiconductor regionsbetween dielectric structure 7 and outer edge 18 to values that are muchlower, typically at least one order of magnitude lower, more typicallyat least two order of magnitude lower than the electric field in theedge termination structure formed by the dielectric structure 7 and thesurrounded semiconductor mesas. In other words, a major portion of theblocking voltage drops across the edge termination structure. Typically,the electric field strength during the blocking mode is very low, forexample substantially zero, in the semiconductor regions 2 betweendielectric structure 7 and outer edge 18. This may be achieved bychoosing the doping concentration of the mesa regions arranged betweenthe insulator-semiconductor interfaces 19 such that the integral dopingconcentration of the mesa regions along a line which is substantiallyperpendicular to the insulator-semiconductor interfaces 19 substantiallymatches the breakdown charge. Dimensioning the edge terminationstructure such that the electric field during the blocking mode issubstantially zero results in a very robust semiconductor device 100since its blocking capability is not or at most only slightly influencedby external contaminations and boundary conditions such as additionalcontact pads and conducting paths arranged on the main horizontalsurface. Furthermore, the doping concentration of the semiconductorregions 2 which are arranged between dielectric structure 7 and outeredge 18 may be chosen higher since these semiconductor regions aretypically at most exposed to low electric fields during the blockingmode.

Next to corner regions of the active area 110, the dielectric structure7 surrounds the pn-junction and the active area 110, respectively, fromtwo sides in plane view and a horizontal cross-section, respectively. Inthe exemplary embodiment, the dielectric structure 7 is substantiallyL-shaped in the corner regions. This means that the dielectric structure7 includes two portions which are in plane view and in the horizontalcross-section, respectively, arranged at an angle of about 90°. The twoportions may adjoin each other as illustrated in FIG. 1. In otherembodiments, between the two portions an adjoining transition portion isarranged which is rounded and/or curved and/or chamfered. Accordingly,the transition portion provides a smoother transition between the twoportions. Thus, the electric field may be better distributed during theblocking mode of the semiconductor device 100.

Typically, dielectric structure 7 includes silicon oxide, for example athermal silicon oxide. During the formation of silicon oxide, positivecharges may be trapped in the silicon oxide. These trapped charges mayreduce the blocking capability of semiconductor device 100. According toan embodiment, at least major portions of the insulator-semiconductorinterface 19 are arranged such that they extend substantially along acrystal plane <100>, <010>, <001> of semiconductor die 40. Typically, atleast major portions of the insulator-semiconductor interface 19 areorientated along a plane forming, in a horizontal cross-section, withthe crystal plane <100>, <010>, <001> an angle of less than about+/−15°, more typically of less than about +/−10°, and even moretypically of less than about +/−5°. In doing so, entrapment of positivecharges during the forming of the dielectric structure 7 may be avoidedor at least significantly reduced. Accordingly, the blocking capabilityof semiconductor device 100 may be improved. In the exemplaryembodiment, the main horizontal surface is parallel to the crystal plane<001> of silicon semiconductor die 40. In other embodiments, the mainhorizontal surface is parallel to crystal plane <010> or <100>. In theseembodiments, at least major portions of the insulator-semiconductorinterface 19 may be orientated substantially parallel to crystal plane<001>.

Alternatively and or in addition, dielectric structure 7 includes fixednegative charges to at least compensate positive fixed charges. Forexample, dielectric structure 7 may be formed as an aluminum-doped orcesium-doped silicon oxide. The total charge of dielectric structure 7may be adjusted by the concentration of dopants and process conditions.

Typically, the rectangular dielectric spiral 70 includes a sequence ofsubstantially block-shaped spiral segments such that a distance abetween neighbouring parallel spiral segments is substantially constant.Accordingly, the electric field during the blocking mode may be betterbalanced between different mesas and spiral segments, respectively. Thusthe blocking capability of semiconductor device 100 may be furtherimproved.

FIG. 2 shows a typical vertical cross-section along line s ofsemiconductor device 100 illustrated in FIG. 1. In the exemplaryembodiment, semiconductor device 100 may be operated as a diode.Accordingly, p-type semiconductor region 1 forms an anode region incontact with a first metallization 10 arranged on anode region 1 andforming an anode metallization. A substantially horizontally orientatedpn-junction 14 is formed in the active area 110 between anode region 1and a typically n⁻-type semiconductor region 2 b which is in ohmiccontact with a second metallization 11 forming a cathode metallizationvia a n⁺-type cathode contact region 31. Typically, semiconductor device100 is a pin-diode (positive intrinsic negative diode). Whereas theanode metallization 10 is only formed in the active area 110, thecathode metallization 11 may cover a back surface 16 arranged oppositeto the main horizontal surface 15 also in the peripheral area 110. Sincethe cathode contact region 31 extends in the horizontal direction intothe peripheral area 120, the mesa regions 2 between the vertical trenchportions 27 and the mesas 2, 3 between outer edge 18 and dielectricstructure 7 are also in ohmic contact with the second metallization 11to allow discharge of thermally generated electron and/or electronsgenerated by radiation during the blocking mode of semiconductor device100.

According to an embodiment, dielectric structure 7 extends verticallybelow pn-junction 14, for example to cathode contact region 31 or evento the second metallization 11. Accordingly, the electric field duringthe blocking mode can safely be reduced in horizontal direction by thedielectric structure 7 and the adjoining mesa regions 2. Typically, asequence of insulating regions 7 which are spaced apart by respectivemesa regions 2 are, in vertical cross-sections, arranged in theperipheral area 120.

Typically, a horizontal extension of the illustrated portions ofvertical trench 27 is, in the vertical cross-section, substantiallyconstant. The horizontal extension of the portions of vertical trench 27may, for example, range from about 100 nm to about 10 μm, more typicallyfrom about 500 nm to about 5 μm, and even more typically from about 0.8μm to about 3 μm. In other embodiments, the horizontal extension of thevertical trench portions 27 may be smaller in a region distal to mainhorizontal surface 15 compared to a region next to main horizontalsurface 15.

Next, an embodiment is described with reference to FIG. 3. Semiconductordevice 101 shown in FIG. 3 is very similar to the exemplary embodimentdescribed above with regard to FIGS. 1 and 2. However, the dielectricstructure 7 of semiconductor device 101 extends vertically not to thecathode contact region 31 but only down to a certain depth d which is,however, larger than a depth at which the electric field during theblocking mode is dropped to about a quarter of the breakdown fieldstrength of the semiconductor material in case the semiconductormaterial in the mesas 2 is silicon and the dielectric structure 7consists of SiO₂. For other materials a different value for the depth dmay be required. This is for the following reasons.

Assuming horizontally equally spaced spiral segments of dielectricstructure 7, as illustrated with respect to FIG. 1, and neglectingboundary effects, the total width and the blocking capability,respectively, of the resulting edge termination structure is mainlydetermined by the field strength in the dielectric material of thespiral segments of dielectric structure 7 and the ratio of the width wof the spiral segments and the width a of the mesa region in a directionwhich is normal to the insulator-semiconductor interface 19. For siliconas semiconductor material of the mesas 2 and silicon oxide as materialof the dielectric structure 7, the field strength in the silicon oxideis, due to the difference in the permittivity, about three times as highas the field strength in the mesas 2. Accordingly, the voltage dropacross the edge termination structure is, during the blocking modeassuming equal widths (w=a), about four times higher compared to thevoltage drop in homogeneous silicon of the same size (w+a). In case wexceeds a, even a higher blocking voltage can be reached compared to ahomogeneous semiconductor having the same size. Accordingly, thedielectric structure 7 typically extends at least to a depth at whichthe electric field strength in the dielectric structure 7 during theblocking mode is equal to or lower than

$\begin{matrix}{E_{mesa} = {\frac{ɛ_{ins}}{ɛ_{mesa}} \cdot E_{BR}}} & (1)\end{matrix}$

with E_(mesa), E_(BR) and ∈_(mesa) being the actual electric fieldstrength, the critical electric field strength and dielectric constantof the semiconductor material respectively while ∈_(ins) being thedielectric constant of the dielectric structure 7. Using silicon andsilicon dioxide as an example, the electric field strength in thedielectric structure 7 has to drop to about a quarter of the criticalfield strength or below. For non-punch through silicon semiconductordevices 101, for which the electric field in the blocking mode does notreach the back surface 16, the dielectric structure 7 and verticaltrenches 27, respectively, extend to at least about three quarters ofthe vertical extension of die 40. Of course, using differentsemiconductor materials and/or dielectric materials, for example poroussilicon oxide, and/or different width a, w of mesas 2 and spiralsegments, respectively, will result in correspondingly different designrules. Generally, the blocking capability be of the edge terminationstructure as disclosed herein can be estimated as:

$\begin{matrix}{{{bc} = {\left( {{\frac{ɛ_{mesa}}{ɛ_{ins}} \cdot \frac{w}{a}} + 1} \right) \cdot {bc}_{mesa}}},} & (2)\end{matrix}$

where ∈_(mesa), ∈_(ins), and bc_(mesa) are the dielectric constant ofthe semiconductor material, the dielectric constant of the dielectricstructure 7 and the blocking capability of a homogeneous region of thesemiconductor material with equal total size (a+w), respectively.Accordingly, the width w of the segments of dielectric structure 7 istypically chosen larger than the width a of the mesas 2.

As can be inferred from equation (1), dielectric structure 7 andvertical trench 27, respectively, typically extend vertically at leastto a depth d at which the electric field in the dielectric structure 7during the blocking mode drops by a factor f

$\begin{matrix}{f = \frac{ɛ_{ins}}{ɛ_{mesa}}} & (3)\end{matrix}$

given by the ratio between the dielectric constant ∈_(ins) of theinsulating regions formed in the vertical trench 27 and the dielectricconstant ∈_(mesa) of the mesas.

Furthermore, using comparatively thin mesa regions (a<w) reduces thevoltage drop in the mesa regions 2 during the blocking mode.Accordingly, generated charge carriers will gain less energy whenaccelerated during the blocking mode. This reduces the risk of forminghot charge carriers, avalanche multiplication, and entrapment of chargecarriers in dielectric structure 7. Thus, the electric field strength inthe mesas may significantly be increased above the bulk breakdown fieldstrength for this semiconductor material without risking avalanchemultiplication and/or breakdown. Thus, the blocking capability mayfurther be increased and/or the total width of the edge terminationstructure reduced. After reaching the insulator-semiconductor interface19, the charge carriers are guided along the insulator-semiconductorinterface 19 and finally drained off to a contact, for example ametallization, or recombined at a pn-junction.

Even further, positive surface charges at the insulator-semiconductorinterface 19 between n-type mesa regions and the segments of dielectricstructure 7 typically contribute to the blocking capability, inparticular if many insulator-semiconductor interfaces 19 are formedbetween active area 110 and outer edge 18. In doing so, an optionallateral field-stop region may be omitted.

FIG. 4 schematically illustrates, in a vertical cross-section, asemiconductor device 150. Semiconductor device 150 shown in FIG. 4 issimilar to the exemplary embodiment described above with regard to FIGS.1 and 2. However, semiconductor device 150 may be operated as a MOSFET.For sake of clarity, only a most right portion of die 40 is illustrated.

In the exemplary embodiment, semiconductor device 150 includes in theactive area 110 insulated gate electrodes 12 which extend from mainhorizontal surface 15 through the p-type semiconductor region 1 forminga body region partially into an n⁻-type drift region 2 a. Accordingly,semiconductor device 150 includes a vertical trench transistorstructure. However, this is only one embodiment. In another embodiment,planar gate electrodes 12 are arranged in or on top of main horizontalsurface 15. Gate electrodes 12 are insulated from the semiconductorregions 1, 2 a and the first metallization 10 forming a sourcemetallization by a gate dielectric region 9 and a dielectric plug 92,respectively. Gate electrodes 12 may be connected to another part ofmetallization on main horizontal surface 15 which is not shown here.N⁺-type source regions 5 and p⁺-type body contact regions 1 c areembedded in body region 1 and in ohmic contact with the sourcemetallization 10. By appropriately biasing gate electrodes 12 againstbody regions 1 a channel region can be formed along the gate dielectricregions 9 in body region 1. Thus, a current flow between sourcemetallization 10 and a second metallization 12 forming a drainmetallization through the channel region, the drift region 2 a and adrain contact region 31 can be switched and/or controlled. Semiconductordevice 150 is typically a power semiconductor device having a pluralityof MOSFET-cells. The peripheral area 120 includes as part of a verticaledge termination structure a dielectric structure 7 as explained abovewith reference to FIGS. 1 to 3.

Typically, die 40 includes a highly doped substrate 20 and an epitaxiallayer 30. Substrate 20 includes one or more back-side contact regions.In the exemplary embodiment, substrate 20 includes one n⁺-type contactregion 31. The vertical extension of substrate 20 and the back-sidecontact region 31, respectively, does not contribute to the blockingcapability of the semiconductor device. The blocking capability isdetermined by the doping concentrations and the vertical extensions ofthe semiconductor regions 1, 2 a forming pn-junction 14. The totalthickness of these semiconductor regions is in the following alsoreferred to as active device thickness. In the exemplary embodiment, theactive device thickness of semiconductor device 150 substantiallymatches the vertical extension of epitaxial layer 30. For silicon, as arule of thumb, the active device thickness in μm is about the requiredblocking voltage in Volts divided by 10. For example, the active devicethickness is about 50 μm to about 60 μm for a 600 V siliconsemiconductor device and about 25 μm to about 30 μm for a 300 V siliconsemiconductor device. These estimates for the active device thicknesstypically also apply to the other semiconductor devices describedherein. For reason of mechanical stability of die 40, the verticalthickness of the layer with the back-side contact regions, i.e. thevertical thickness of substrate 20 in the exemplary embodimentillustrated in FIG. 4, is typically larger than the active devicethickness.

FIG. 5 schematically illustrates, in a vertical cross-section, asemiconductor device 170. Semiconductor device 170 shown in FIG. 5 issimilar to the exemplary embodiment described above with regard to FIG.4. However, semiconductor device 170 may be operated as an IGBT. Forthis purpose, n⁺-type contact region 31 is exchanged in the active areaby a p⁺-type collector region 41 in ohmic contact with the secondmetallization 12 forming a collector metallization. In the exemplaryembodiment, collector region 41 is insulated from n⁺-type contact region31 in the peripheral area 120 by dielectric structure 7 which extends tothe collector metallization 11 and back surface 16, respectively. Theperipheral area 120 includes as part of a vertical edge terminationstructure a dielectric structure 7 as explained above with reference toFIGS. 1 to 3.

FIG. 6 schematically illustrates, in a vertical cross-section, asemiconductor device 175. Semiconductor device 175 shown in FIG. 6 issimilar to the exemplary embodiment described above with regard to FIG.5 and may also be operated as an IGBT. However, semiconductor device 170further includes in the active area 110 an integrated free-wheelingdiode which is separated from the IGBT-cell by an additional deepvertical trench 27 a filled with a dielectric layer 7 a which bothextend from main horizontal surface 15 to back surface 16. Body region 1of the IGBT-structure and anode region 1′ of the diode-structure may beformed from a common p-type semiconductor region but may also havedifferent doping concentrations and/or vertical extensions. In theexemplary embodiment, dielectric layer 7 a is used to separate anIGBT-structure from a diode structure. It goes without saying that aplurality of dielectric layers 7 a may be used in active area 110 toseparate and/or insulate different semiconductor structures, for exampleadjacent cells, from each other. Dielectric structure 7 and dielectriclayer 7 a may be formed in common processes.

FIG. 7 schematically illustrates, in a plane view, a semiconductordevice 200. According to one or more embodiments. Semiconductor device200 shown in FIG. 7 is similar to the exemplary embodiments describedabove with regard to FIGS. 1 to 6. However, dielectric structure 7 ofsemiconductor device 200 includes a plurality of dielectric regions 71,72, 74, 75 arranged in separated vertical trenches 27 instead of oneopen circumferential dielectric structure formed in plane view as aspiral.

In the exemplary embodiment, the plurality of vertical trenches 27 isarranged around the active area 110. Typically, each vertical trench 27is inclined against outer edge 18. Accordingly, charges, in particularholes ⊕, that are generated thermally or by ionizing radiation duringthe blocking mode of semiconductor device 200 are guided along thedielectric regions 71, 72, 74, 75 and are hence not accumulated.Accordingly, switching losses may be reduced.

Typically, vertical trenches 27 are, in plane view and in a horizontalcross-section, at least in sections or portions substantially formed aselongated rectangles. An acute angle is formed between outer edge 18 andvertical trenches 27 and/or their sections and/or the elongationdirection of vertical trenches 27 and/or their sections, respectively.The acute angle typically ranges between about 1° and about 20°, moretypically between 1° and 15°, and even more typically between 1° and10°.

In the corner regions of active area 110, the vertical trenches 27 anddielectric regions 71, respectively, are, in the horizontalcross-section and in the plane view, respectively, substantiallyL-shaped, i.e. they include two portions which are, in the horizontalcross-section and in the plane view, respectively, arranged at an angleof about 90°. Accordingly, the vertical trenches 27 and dielectricregions 71, respectively, of the corner regions surround active area 110from two sides. In the exemplary embodiment, each of the four cornerregions is surrounded by three neighboring L-shaped vertical trenches 27and dielectric regions 71, respectively. Closer to the corner regions ofdie 40, further substantially bar-shaped dielectric regions 74, 75, i.e.dielectric regions 74, 75 that are substantially shaped as elongatedrectangles in plane view, may be arranged. Dielectric regions 74, 75 aresubstantially parallel to one of the two portions of the L-shapeddielectric regions 71. For sake of clarity, only two different exemplarydesigns of additional bar-shaped dielectric regions 74, 75 areillustrated in FIG. 7 for the upper corner regions. It goes withoutsaying that each of the four corner regions may include additionalbar-shaped dielectric regions 74, 75 according to one of the twoexemplary designs. Between the corner regions, a plurality ofsubstantially bar-shaped dielectric regions 72 is arranged. Thesubstantially bar-shaped dielectric regions 72 are parallel to one ofthe two portions of the L-shaped dielectric regions 71 in the cornerregion. Dielectric structure 7 formed by the substantially bar-shapedregions 71, 74, 74 and the L-shaped dielectric regions 71 is, similar asexplained above with respect to FIG. 1, typically also inclined againstouter edge 18. Furthermore, the insulator-semiconductor interface 19formed between mesa regions 2 of die 40 and dielectric structure 7 aretypically also arranged substantially parallel to crystal planes <100>,<010> of die 40 to reduce incorporation of negative charges duringforming dielectric structure 7.

Arranging the plurality of dielectric regions 71, 72, 74, 75 inseparated vertical trenches 27 around active area 110 instead of onecircumferential dielectric structure results in an edge terminationstructure which may require even less area than the edge terminationexplained above with reference to FIG. 1. Vertical cross-section throughsemiconductor device 200 may be similar as explained above withreference to FIGS. 2 to 6. Accordingly, active area 110 of semiconductordevice 200 may, for example, include a diode, an IGBT and/or a MOSFET.

According to an embodiment, the edge termination structure ofsemiconductor device 200 further includes a closed vertical trench 28surrounding the active area 110 and the vertical trenches 27. In theexemplary embodiment, closed vertical trench 28 is not inclined againstouter edge 18. Closed vertical trench 28 may include a circumferentialfield plate, a circumferential poly-Silicon-filling, and acircumferential channel stop region. Due to the low electric fieldvalues in the mesa region 2 outside dielectric structure 7 during theblocking mode of semiconductor device 200, doping concentration of asemiconductor material filling closed vertical trench 28 and fixedcharges in or at a dielectric material filling closed vertical trench 28are uncritical.

Typically, vertical trenches 27 are substantially spaced apart from theclosed vertical trench 28 and/or outer edge 18 by the same respectivehorizontal distance d₁, d₂, as illustrated in FIG. 7. In otherembodiments, vertical trenches 27 and dielectric regions 71, 72, 74, 75extend to closed vertical trench 28.

In addition, dielectric structure 7 may be spaced apart from apn-junction 14 a. Alternatively, dielectric regions 71 and/or dielectricregions 72 may, in horizontal direction, extend across pn-junction 14 a.In addition, pn-junction 14 a may have different radius at the cornersand/or may have different distance to inner end of dielectric structures7 at the corner and the straight parts of the termination structure.

Typically, at least four, more typically at least 10, even moretypically at least 20 insulator-semiconductor interface 19 are crossedby each path x in a horizontal cross-section. Accordingly, even highelectric fields can be absorbed by the edge termination structure. Thisis further explained in the following.

FIG. 8 schematically illustrates an electric field distribution acrossan edge termination structure during the blocking mode of a verticalsilicon diode. A two dimensional device simulation was performed for anedge termination structure which is similar to the edge terminationstructures as explained above with reference to FIGS. 1 and 7. However,the dielectric structure 7 used for simulation has, in a verticalcross-section through the device, twelve portions made of silicon oxide.The simulation may, therefore, correspond to a vertical section alongpath x as shown in FIG. 1 when the dielectric spiral in FIG. 1 isreplaced by a dielectric spiral which winds twelve times around theactive area. The simulation may also correspond to a vertical sectionalong path x similar as shown in FIG. 7 but with more vertical trenches.Electric field is shown as function of distance from p-typesemiconductor region 1 at the main horizontal surface. As can be seen,electric field strength is, except for the outermost portions, about 2.5times higher in the dielectric structure 7 compared to the electricfield in the mesa regions 2. Accordingly, a major portion of the voltagedrops across the dielectric structure 7. FIG. 9 schematically shows thecorresponding current-voltage characteristics of the semiconductordevice. A closer look reveals that a breakdown voltage of more than 600Vcan be achieved with this edge termination structure at a horizontalextension of only about 20 μm. Higher blocking capabilities may beachieved with more insulator-semiconductor interfaces 19 and/or widerparts of dielectric structures 7.

FIG. 10 schematically illustrates, in a plane view, a semiconductordevice 300. Semiconductor device 300 shown in FIG. 10 is similar to theexemplary embodiments described above with regard to FIG. 1. However,the rectangular dielectric spiral 70 of semiconductor device 300 isspaced apart from the active area 110. Furthermore, an optional closedcircumferential trench 28 is arranged around the rectangular dielectricspiral 70 in the peripheral area 120. Circumferential trench 28 may, forexample, be filled with a dielectric ring 77 forming a field-stopregion. In this embodiment, the outermost spiral segment of dielectricspiral 70 may extend to the dielectric ring 77. To improve draining ofholes during the blocking mode of semiconductor device 300, a buttingcontact 25, i.e. a short-circuited n⁺-p⁺-contact, may be formed next tothe dielectric ring 77, for example close to the back surface ofsemiconductor device 300.

In other embodiments, the circumferential field-stop region is formed byan n⁺-type ring-shaped structure 3 extending into die 40. N⁺-typering-shaped structure 3 may be formed by epitaxy, implantation, forexample with protons, or diffusion, for example diffusion of phosphorousor selenium.

FIG. 11 schematically illustrates, in a plane view, a semiconductordevice 400. Semiconductor device 400 shown in FIG. 11 is similar to theexemplary embodiments described above with regard to FIG. 1. However,dielectric structure 7 of semiconductor device 400 is, in the plane viewand a horizontal cross-section, respectively, formed as a hollow spiral78. The closed sidewall 91 of vertical trench 27 of semiconductor device400 is insulated and forms a closed insulator-semiconductor interface 19with an n-type semiconductor region 4 forming a semiconductor mesa 4.Typically, the remaining inner portion of vertical trench 27 is alsofilled with an n-type semiconductor region 2 forming a semiconductormesa 2. Semiconductor mesa 2 forms an additional closedinsulator-semiconductor interface 19 a with the dielectric structure 7.To improve discharge of holes and electrons generated during theblocking mode of semiconductor device 400, a highly doped p-type contactregion 23 for holes and/or a highly doped n-type contact region 24 forelectrons may be provided at the innermost spiral segment and theoutermost spiral segment, respectively, of hollow spiral 78. Typically,contact region 23 is in ohmic contact with a first metallization (notshown in FIG. 11) arranged on the main horizontal surface of die 40.Likewise, contact region 24 is typically in ohmic contact with a secondmetallization (not shown in FIG. 11) arranged opposite to the firstmetallization.

In some embodiments, the dielectric regions 71, 72, 74, 75 arranged inseparated vertical trenches 27 explained above with regard to FIG. 7 mayalso be replaced by respective hollow dielectric structures which areformed by dielectric layers arranged on the sidewalls of the verticaltrenches 27 and filled in the remaining central portion with asemiconductor material.

FIG. 12 shows a typical vertical section along line t of semiconductordevice 400 illustrated in FIG. 11. For sake of clarity only a most rightportion of the active area 110 is illustrated in FIG. 12. In theexemplary embodiment, semiconductor device 400 may be operated as aTEDFET. Accordingly, active area 110 includes a verticalMOSFET-structure 112, which is similar to the MOSFET-structure explainedabove with regard to FIG. 4. For sake of clarity only a most rightportion of the vertical MOSFET-structure 112 is illustrated in FIG. 12.A gate electrode 12 which is insulated from adjacent semiconductorregions by gate dielectric region 9 extends from main horizontal surface15 through the p-type body region 1 and partially into an n⁻-type driftregion 2 a. N⁺-type source regions 5 and p⁺-type body contact regions(not shown in FIG. 12) are embedded in body region 1 and in ohmiccontact with the source metallization 10. The drift region 2 a is inohmic contact with the drain metallization 11 via drain contact region31. In addition, a drift channel control structure 111 is arranged nextto MOSFET-structure 112. A drift control region 4 a, which may also beof n⁻-type, is arranged adjacent to drift region 2 a. Drift controlregion 4 a is dielectrically insulated from drift region 2 a. Adielectric layer 7 a is arranged between drift region 2 a and driftcontrol region 4 a and extends very deeply into semiconductor die 40. Inthe exemplary embodiment, dielectric layer 7 a extends to a bottomdielectric layer 17. Accordingly, drift control region 4 a is alsoinsulated from drain metallization 11. The function of the drift controlregion 4 a is to control a conducting channel in the drift region 2 aalong dielectric layer 7 a if the MOSFET-structure is in its on-state.Drift control region 4 a therefore serves to reduce the on-resistance ofthe overall transistor component.

Unlike in usual MOSFETs, drift region 2 a of semiconductor device 400may, disregarding of the type of the MOS transistor structure, ben-doped or p-doped. If, for example, in an n-type MOSFET-structure 112drift region 2 a is n-doped, then an accumulation channel is formedalong dielectric layer 7 a and controlled by drift control region 4 a.In this embodiment, dielectric layer 7 a is also referred to asaccumulation layer. If in an n-type MOSFET-structure 112 drift region 2a is p-doped, then an inversion channel forms along dielectric layer 7 ain drift region 2 a, if the component is in its on-state. Like a usualMOSFET this component is in its on-state if a voltage is applied betweensource and drain regions 5, 31 or source and drain metallizations 10,11, respectively, and if a suitable electrical potential is applied togate electrode 12 that effects a conducting channel in body region 1between source region 5 and drift region 2 a. In an n-typeMOSFET-structure 112 the voltage to be applied between drain region 31and source region 5 in order to put the component in its on-state is apositive voltage, and the gate potential is a positive potential ascompared to source potential.

If the semiconductor device 400 is in its on-state charge carriers arerequired in the drift control region 4 a to form the accumulation orinversion channel along dielectric layer 7 a in the drift region 2 a. Ina semiconductor device 400 having an n-type MOSFET structure 112, holesare required in the drift control region 4 a for forming this conductingchannel. These charge carriers in the drift control region 4 a are onlyrequired, if the component is in its on-state. If the component is inits blocking state, these charge carriers are removed from drift controlregion 4 a and—equivalently to drift region 2 a—a space charge zone ordepletion zone forms in drift control region 4 a. In this connection itshould be mentioned that drift control region 4 a may be of the sameconduction type as drift region 2 a or may be of a complementaryconduction type.

The charge carriers that are moved from drift control zone 4 a, if thecomponent is in its blocking mode, are stored in an integrated capacitorstructure until the component is switched on for the next time. Thisintegrated capacitor structure is formed in a connection region 1 a thatadjoins drift control region 4 a and that is p-doped for an n-typecomponent. Further, the integrated capacitor structure can partly extendinto drift control region 4 a. Connection region 1 a and drift controlregion 4 a act as the carrier layer for an insulated electrode 13 of theintegrated capacitor structure. Electrode 13 is insulated by adielectric layer 9 a and in the following also referred to as insulatedcapacitor electrode. For providing charge carriers to the drift controlzone 4 a, if the component is switched on for the first time, i.e., ifthe integrated capacitor structure has not been charged, yet, driftcontrol region 4 a may be coupled to a gate terminal and gatemetallization G, respectively, via connection region 1 a. In this case,charge carriers are provided from a gate driver circuit that, inoperation of semiconductor device 400, is coupled to the gate terminalG. A diode 55 that is coupled between gate terminal G and the connectionregion 1 a serves to prevent discharging the drift control region 4 a inthe direction of the gate terminal G. Of course drift control zone 4 acan also be charged by other means, e.g. by contacting to an externalvoltage source.

According to an embodiment, dielectric layer 7 a arranged in verticaltrench 27 a and dielectric structure 7 arranged in vertical trench 27extend to bottom dielectric layer 17. Accordingly, discharging driftcontrol region 4 a to adjacent semiconductor regions 2, 2 a isprevented. Furthermore, dielectric structure 7 formed in the exemplaryembodiment as a hollow spiral 78 provides together with the mesa regions2 and 4 an edge termination structure with only low chip area. Evenfurther, dielectric layer 7 a and dielectric structure 7 may at leastpartly be formed in common processes. This will be explained below withregard to FIGS. 22 to 30.

Next, an embodiment is described with reference to FIG. 13.Semiconductor device 401 shown in FIG. 13 is very similar to theexemplary embodiment described above with regard to FIGS. 11 and 12 andmay also be operated as a TEDFET. However, an additional closedcircumferential trench 28 is arranged around rectangular hollowdielectric spiral 78 in the peripheral area 120 of semiconductor device401.

In the exemplary embodiment, the sidewalls of closed circumferentialtrench 28 are insulated by two circumferential dielectric layers 76 thatextend in the vertical direction typically also to the bottom dielectriclayer. Between the two circumferential dielectric layers 76 a mesaregion 2 is arranged. Circumferential trench 28 may, however, also becompletely filled with a dielectric ring forming a field-stop region asexplained above with regard to FIG. 10.

FIG. 14 schematically illustrates, in a plane view, a semiconductordevice 402. Semiconductor device 402 shown in FIG. 14 is very similar tothe exemplary embodiment described above with regard to FIGS. 11 and 12and may also be operated as a TEDFET. However, the dielectric structure7 includes, in the horizontal cross-section, instead of a hollow spirala first dielectric spiral 70 and a second dielectric spiral 79 whichwinds around the first dielectric spiral 70. Due to the highly dopedp-type contact region 23 for holes and the highly doped n-type contactregion 24, discharge of holes and electrons generated during theblocking mode of semiconductor device 402 may be improved.

In some embodiments, two dielectric spirals that wind around each othermay also be used as part of an edge termination structure instead of onedielectric spiral for the semiconductor devices explained above withregard to FIGS. 1 to 6.

With respect to FIGS. 15 to 21 methods for forming a semiconductordevice 176 are illustrated in respective vertical cross-sections. Thesefigures show vertical cross-sections through a semiconductor substrate40′ during or after particular method processes. In a first process, asemiconductor wafer 40′ or semiconductor substrate 40′, from which laterindividual dies are to be formed, is provided. An active area 110 and aperipheral area 120 are defined in the semiconductor substrate 40′. Thefirst semiconductor wafer 101 may be made of any suitable semiconductormaterial such as Si or GaN or SiC. In the exemplary embodimentillustrated in FIG. 15, semiconductor substrate 40′ includes an n-typelayer 21 extending to a main horizontal surface 15. Furthermore, ann⁺-type backside contact region 31 and a p⁺-type backside contact region41 are arranged below n-type layer 21 and extend to an opposite surface16 a. A portion of p⁺-type backside contact region 41 typically laterforms a collector region of an IGBT-structure. A portion of n⁺-typebackside contact region 31 arranged in an active area 110 typicallyforms a contact region of an integrated free-wheeling diode, whereas afurther portion of n⁺-type backside contact region 31 arranged in anperipheral area 120 typically forms a contact region of an edgetermination structure. In embodiments in which a MOSFET is to be formed,n⁺-type backside contact region 31 typically forms a continuous layerbetween n-type layer 21 and opposite surface 16 a. In some embodiments,the n⁺ and/or p⁺ backside contact regions may be formed later in theprocess, e.g. after thinning the device.

Thereafter, a pn-junction 14 is formed in semiconductor substrate 40′.This is typically done by forming a p-type semiconductor region 1 inn-type layer 21 from main horizontal surface 15, for example byimplantation and subsequent drive-in processes. The resultingsemiconductor structure 176 is illustrated in FIG. 16. A portion of thepn-junction 14 may, in another cross-section, extend to main horizontalsurface 15.

Thereafter, a vertical trench 27 a is formed in the active area and oneor more vertical trenches 27, 28 are formed in the peripheral area 120.In the following, vertical trench 27 a is also referred to as innervertical trench. The vertical trenches 27, 27 a, 28 extend from the mainhorizontal surface 15 into the semiconductor substrate 40′ and below thepn-junction 14. The resulting semiconductor structure 176 is illustratedin FIG. 17.

Vertical trenches 27, 27 a, 28 may be formed in a common process,typically by etching using a mask, for example a SiO₂-mask. Typically,vertical trenches 27, 27 a, 28 have substantially the same verticaldepth. In the exemplary embodiment, vertical trenches 27, 27 a, 28extend completely through n-type layer 21. Vertical trench 27 a ofactive area 110 extends through pn-junction 14 and partially inton⁺-type backside contact region 31 and p⁺-type backside contact region41. Vertical trenches 27, 28 of peripheral area 120 extend partiallyinto n⁺-type backside contact region 31. Accordingly, the remainingn-type layer 21 is subdivided in two portions 2 a and 2 b in active area110 and several mesas 2 in the peripheral area 120.

Furthermore, the p-type semiconductor region 1 is typically subdividedinto two portions 1′, 1″. Later, left portion 1″ and the right portion1′ typically form a body region and an anode region, respectively. Thewidth of trenches 27, 27 a, 28 in the vertical cross-section may beequal and is typically larger than about 25 μm in case a powersemiconductor device is formed.

Although different vertical trenches 27 are shown in verticalcross-sections, these trenches may be connected and formed in plane viewas a spiral surrounding active area 110. An innermost segment of thespiral may, as illustrated in FIG. 17, adjoin p-type semiconductorregion 1. Next to corner regions of active area 110, vertical trench 27is in plane view substantially L-shaped. Vertical trench 28 is optionaland may have a greater width than the vertical trenches 27, 27 a.Typically, vertical trench 28 is formed in plane view as acircumferential trench.

Thereafter, a dielectric region 70 is formed in the vertical trench 27,typically by thermal oxidation if the semiconductor substrate 40′ is asilicon substrate. Dielectric region 70 may however also be formed byCVD-deposition and a planarization process or a back etching process.The mask typically used for forming vertical trenches 27, 27 a, 28 mayalso be used to protect main horizontal surface 15 from being oxidizedor as a stop region for a CMP-process. Vertical trench 27 is typicallycompletely filled with dielectric region 70 forming, for example, adielectric spiral in the peripheral area 120. Furthermore, a dielectriclayer 7 a and a dielectric ring 77 are formed in vertical trenches 27 aand 28, respectively. The resulting semiconductor structure 176 isillustrated in FIG. 18. Dielectric layer 7 a and dielectric ring 77 maybe formed together with dielectric region 70.

In plane view and in a horizontal cross-section, dielectric region 70typically surrounds the pn-junction 14 from all sides. Accordingly, adielectric structure 7 is formed by dielectric region 70 that togetherwith mesa regions 2 forms an edge termination structure of comparativelysmall horizontal extension at given blocking capability. Typically,dielectric region 70 is formed such that insulator-semiconductorinterfaces 19 extend substantially along crystal planes of semiconductorsubstrate 40′ to reduce entrapment of fixed negative charges. An anglebetween respective crystal planes and portions of theinsulator-semiconductor interfaces 19 is typically less than about+/−15°, more typically of less than about +/−10°, and even moretypically of less than about +/−5°.

Thereafter, semiconductor substrate 40′ is processed at opposite surface16 a to thin semiconductor substrate 40′ to back-surface 16. This is maybe done by polishing, etching, grinding, and/or a CMP process.Typically, dielectric region 70, dielectric layer 7 a and/or dielectricring 77 are used as stop-regions for thinning semiconductor substrate40′. The resulting semiconductor structure 176 is illustrated in FIG.19.

Thereafter, n⁺-type source regions 5 and p⁺-type body contact regions 1a are formed in a left portion of semiconductor region 1 forming a bodyregion. An insulated gate electrode 12 is formed in a shallow trenchwhich extends from main horizontal surface 15 through the body region.For example, a gate dielectric region 9 is formed at the walls of theshallow trench, typically as a thermal oxide. A poly-silicon isdeposited and partly etched back to form gate electrode 12. A dielectricplug 92 is formed on gate electrode 12, for example by thermaloxidation. Thereafter, a first metallization 10 and a secondmetallization are formed on main horizontal surface 15 and back surface16, respectively. The resulting semiconductor structure 176 isillustrated in FIG. 20. First metallization 10 is in ohmic contact withsource regions 5, body contact regions 1 a and the right portion ofp-type semiconductor region 1 forming an anode region. Accordingly,first metallization forms a combined emitter metallization for anIGBT-structure and anode metallization for a diode structure. The secondmetallization 11 is in ohmic contact with the p⁺-type backside contactregion 41 forming a collector region of the IGBT-structure and then⁺-type backside contact region 31 forming cathode region of the diodestructure and a contact region of the mesas 2, respectively.

Thereafter, the semiconductor substrate 40′ is divided to form separatedies 40 each of which extends to an outer edge 18. Typically, thesemiconductor substrate is cut or sawed to form separate dies 40.According to an embodiment, dividing is performed such that thedielectric region 7 is inclined against outer edge 18, for example by 1°or more. The resulting semiconductor device 176 is illustrated in FIG.21. Semiconductor device 176 is similar to the semiconductor deviceexplained above with regard to FIG. 6 and may also be operated as anIBGT with integrated free-wheeling diode. However, semiconductor device176 includes a field-stop region formed by dielectric ring 77 in theperipheral area 120.

With respect to FIGS. 22 to 30 methods for forming a semiconductordevice 450 are illustrated in respective vertical cross-sections. In afirst process a semiconductor substrate 40′ is provided. In theexemplary embodiment shown in FIG. 22, semiconductor substrate 40′ is anSOI-wafer (Silicon-On-Insulator) having a buried oxide layer 171arranged between n⁻-type semiconductor layer 21 extending to a mainhorizontal surface 15 and an n⁺ type backside contact layer 31 extendingto an opposite surface 16 a. An active area 110 and a peripheral area120 are defined in semiconductor substrate 40′.

Thereafter, at least one vertical trench 29 a and at least one verticaltrench 29 are formed in active area 110 and peripheral area 120,respectively. This is typically done by masked etching using buriedoxide layer 171 as an etch-stop. Small etching into the buried oxidelayer 171 may take place but is not shown in FIG. 23. The resultingsemiconductor structure 450 is illustrated in FIG. 23. Typically,vertical trenches 29, 29 a have a respective width in the shown verticalcross-section of more than about 25 μm, more typically of more thanabout 50 μm and are therefore in the following also referred to as widevertical trenches. For silicon, as a rule of thumb, the final activethickness of the device in μm is about the required blocking voltage inVolts divided by 10.

Thereafter, buried oxide layer 171 is etched through, typically byanisotropic oxide etching, to expose backside contact layer 31 in widevertical trenches 29, 29 a between remaining portions 17 of buried oxidelayer 171. The resulting semiconductor structure 450 is illustrated inFIG. 24.

Thereafter, a sacrificial dielectric layer 76 is formed at the sidewalls of wide vertical trenches 29, 29 a. This is typically done bythermal oxidation. The thermal oxide formed on backside contact layer 31is removed, for example by anisotropic oxide etching. The sacrificialdielectric layer 76 formed on main horizontal surface 15 may at leastpartly remain there. The resulting semiconductor structure 450 isillustrated in FIG. 25.

Thereafter, wide vertical trenches 29, 29 a are filled with n-typesemiconductor regions 2. This is typically done by selective epitaxyfollowed by processing the main horizontal surface 15. Accordingly,semiconductor regions 2 are formed as epitaxial filling in thisembodiment. Processing may include polishing, etching, grinding, and/ora CMP process. Any remaining portion of the sacrificial dielectric layer76 on main horizontal surface 15 may be used as a stop region forplanarization. The resulting semiconductor structure 450 is illustratedin FIG. 26. Semiconductor regions 2 and remaining portions 4 ofsemiconductor layer 21 are in the following also referred to as mesaregions. Mesa regions 2 extend to backside contact layer 31 and arelater typically contacted to a back metallization. Different thereto,mesa regions 4 are separated from backside contact layer 31 by remainingportion 17 of the buried oxide layer.

Thereafter, sacrificial dielectric layer 76 is typically removed.Removing sacrificial dielectric layer 76 may include a wet chemicaletching using a solution containing hydrofluoric acid (HF). Theresulting semiconductor structure 450 is illustrated in FIG. 27. Due toforming and removing sacrificial dielectric layer 76, any surfacedefects resulting from previous processes are typically removed.Accordingly, a better dielectric may be formed on the exposed sidewallsof formed vertical trenches 27, 27 a. Vertical trenches 27, 27 a have,in the vertical cross-section typically a much lower horizontalextension and a much higher aspect ratio than the wide verticaltrenches.

Thereafter, dielectric layers 7 a and 7 b are formed in verticaltrenches 27 a and 27, respectively. This is typically done by thermaloxidation. The resulting semiconductor structure 450 is illustrated inFIG. 28. Dielectric layer 7 b is typically formed in plane view as ahollow spiral 78. The width of the mesa regions 2, 4 and dielectriclayers 7 b may be reduced and increased, respectively, by further cyclesof removing dielectric layer 7 b and thermal oxidizing of trenchsidewalls while dielectric layer 7 a is masked. In other words,dielectric layer 7 b may also be used as a sacrificial dielectric layer.Accordingly, the width of dielectric layer 7 a, i.e. the horizontalextension of dielectric layer 7 a in the illustrated verticalcross-section, may be kept small, for example below 100 nm or even below60 nm, and the final width of dielectric layers 7 b may be increased toa value above about 200 nm, more typically about 500 nm. Accordingly, anedge termination structure with a dielectric structure 7 may be formedin the peripheral area 120, such that the thickness of dielectric layers7 b of dielectric structure 7 is sufficiently large and independentlyadjustable from the thickness of dielectric layer 7 a in the active area110. Dielectric layer 7 a may, for example, be used to separatedifferent semiconductor structures from each other, as explained abovewith reference to FIG. 6, and/or as a thin accumulation layer of aTEDFET as explained above with reference to FIG. 12.

Furthermore, the thickness of dielectric layers 7 b may become lowerwith increasing distance from main horizontal surface 15. This may beachieved by appropriate etching scheme in vertical trenches of withaspect ratios above about 10 resulting in partial removal ofsemiconductor material in an upper portion of the vertical trench duringremoving the sacrificial dielectric layers 7 a and/or 7 b.

Thereafter, a pn-junction 14 is formed in mesa regions 2, 4 of activearea 110. This is typically done by forming p-type semiconductor regions1, 1 a in active area 110 from main horizontal surface 15, respectively,for example by common implantation and subsequent drive-in processes.The resulting semiconductor structure 450 is illustrated in FIG. 29.Remaining portions of mesa region 2 and mesa region 4 of active area 110form a drift region 2 a and a drift control region 4 a, respectively.Typically, semiconductor regions 1, 1 a later form a body region and aconnection region 1 a of a TEDFET-structure.

With regard to FIG. 30 further processes are explained. Body regions 5and source regions (not shown in FIG. 30) are formed in semiconductorregion 1, for example by implantation and subsequent drive-in processes.Furthermore, an insulated gate electrode (not shown in FIG. 30) and aninsulated capacitor electrode 13 are formed such that they extendthrough p-type semiconductor region 1 and p-type semiconductor region 1a, respectively. Thereafter, a first metallization 10 is formed on mainhorizontal surface 15. First metallization 10 is in ohmic contact withbody regions 5, source regions and insulated capacitor electrode 13.Optionally, backside contact region 31 may be thinned, for example usinga CMP-process to a back surface 16. A second metallization 11 is formedopposite to first metallization 10. Thereafter, the semiconductorsubstrate is divided to form separate dies 40 which extend to an outeredge 18. Typically, the semiconductor substrate is cut or sawed to formseparate dies 40. According to an embodiment, dividing is performed suchthat the dielectric region 7 is inclined against outer edge 18.Typically, first metallization 10 and second metallization 11 form asource metallization and a drain metallization, respectively.Accordingly, semiconductor device 450 may be operated as a TEDFET.

The manufacturing processes explained above with regard to FIGS. 15 to21 and 22 to 30 have in common that a dielectric structure which extendsfrom a main horizontal surface into a semiconductor substrate is formedin a peripheral area defined in a semiconductor substrate. Thedielectric structure is formed such that it surrounds an active area andincludes, in a horizontal cross-section, substantially L-shaped portionswhich are arranged next to corner regions of the active area. An outeredge is formed, for example by cutting the semiconductor substrate intodifferent dies, so that the substantially L-shaped portions are, in thehorizontal cross-section, inclined against the outer edge. Accordingly,a semiconductor device, typically a power semiconductor device, with anedge termination of low space requirements is formed.

The written description above uses specific embodiments to disclose theaspects of the application, including the best mode, and also to enableany person skilled in the art to make and use these aspects. While theinvention has been described in terms of various specific embodiments,those skilled in the art will recognize that the invention can bepracticed with modification within the spirit and scope of the claims.Especially, mutually non-exclusive features of the embodiments describedabove may be combined with each other. The patentable scope is definedby the claims, and may include other examples that occur to thoseskilled in the art. Such other examples are intended to be within thescope of the claims if they have structural elements that do not differfrom the literal language of the claims, or if they include equivalentstructural elements with insubstantial differences from the literallanguages of the claims.

What is claimed is:
 1. A semiconductor device, comprising: asemiconductor die comprising an outer edge and an active area defining amain horizontal surface and being spaced apart from the outer edge; andan edge termination structure comprising a closed vertical trenchsurrounding the active area, the edge termination structure furthercomprising at least one vertical trench arranged, in a horizontalcross-section, between the closed vertical trench and the active area,the at least one vertical trench comprising an insulated side wallforming an acute angle with the outer edge.
 2. The semiconductor deviceof claim 1, wherein the at least one vertical trench is, in thehorizontal cross-section, substantially formed as an elongatedrectangle.
 3. The semiconductor device of claim 1, wherein the insulatedside wall extends to the closed vertical trench.
 4. The semiconductordevice of claim 1, wherein the closed vertical trench comprises at leastone of a circumferential field plate, a circumferential poly-Si-filling,and a circumferential channel stop region.
 5. The semiconductor deviceof claim 1, wherein the active area comprises a pn-junction, and whereinthe insulated side wall extends at least to the pn-junction.
 6. Thesemiconductor device of claim 1, wherein the edge termination structurecomprises a plurality of vertical trenches each of which is arranged atsubstantially the same horizontal distance to the closed vertical trenchand/or the outer edge.
 7. The semiconductor device of claim 6, whereinthe active area is completely surrounded by the plurality of verticaltrenches.